MEMS Materials and Processes Handbook

  • Springer
  • 2020
  • Elektronisk medie
  • 0
  • English
  • 1
  • 9780387473185

MEMs Materials and Processes Handbook&quote; is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on &quote;Materials&quote; and &quote;Processes&quote;. The extensive Material Selection Guide&quote; and a &quote;Material Database&quote; guides the reader through the selection of appropriate materials for the required task at hand. The &quote;Processes&quote; section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.